Optoelectronic Fusion Bonding Technology
Fusion or direct wafer bonding enables permanent connection via dielectric layers on each wafer surface used for engineered substrate or layer transfer such as backside illuminated CMOS image sensors. EVG's HI Competence Center is designed to help enable new products and applications driven by advances in system integration and packaging. Hybrid bonding extends fusion bonding with embedded metal pads in the bond interface, allowing for face-to-face connection of wafers. Focusing on photonic integrated circuits (PICs), which are based on SOI fabrication infrastructure, heterogeneous integration of III-V materials, such as indium phosphide (InP), enables high performance devices at low cost and high volumes. Fusion bonding plays a pivotal role in enabling CFET and BSPDN structures in logic devices, as well as advanced 3D memory structures.
Read More
